GRAPHENE Equipment
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Thermal R2R CVD SYSTEM : CHG-60
ITEM | SPECIFICATION | |
---|---|---|
System composition | Process chamber | |
Roll Width | Max 60mm | |
Roll length | Max 10m | |
Temp Uniformity | ≤±1%(@300x60mm²) | |
Ultimate Pressure | 1mTorr | |
Process Temp | RT~1100°C | |
Ramping Rate | 2.5°C/min |
Thermal R2R CVD SYSTEM : CHG-150
ITEM | SPECIFICATION | |
---|---|---|
System composition | Process chamber,LL,ULL | |
Roll Width | Max 150mm | |
Roll length | Max 150m | |
Temp Uniformity | ≤±1%(@300x60mm²) | |
Ultimate Pressure | 1mTorr | |
Process Temp | RT~1100°C | |
Ramping Rate | 100°C/min |
Thermal R2R CVD SYSTEM : CHG-200
ITEM | SPECIFICATION | |
---|---|---|
System composition | Process chamber,LL,ULL | |
Roll Width | Max 200mm | |
Roll length | Max 200m | |
Temp Uniformity | ≤±1%(@300x60mm²) | |
Ultimate Pressure | 1mTorr | |
Process Temp | RT~1100°C | |
Ramping Rate | 100°C/min |